The system supports up to 4095 levels of grayscale, pure binary mode.
The maximum alignment accuracy of the system is less than 250 nm, and the uniformity of line width is less than 50 nm.
The system supports up to 9 “ substrate, 400 mm/s scan speed, 350x350 mm2 exposure area.
The system is designed in a fully enclosed structure, with the necessary components, control architecture and vacuum pump in the housing for quick installation.
When the system is connected to the air temperature regulator unit and the air conditioning is supplied, the built-in stack filters will produce clean cross air flow.
The system motion platform is supported by a mechanical vibration mitigation system, which will filter out most of the noise vibration to ensure the minimum vibration during operation.