Spare Parts


Product Introduction

Spare Parts
Located in Hong Kong and Singapore
Large selection of ASML mature products parts
check the spare parts list

Please fill in your information

We will send the product manual to your mailbox

(The information you submit will be strictly confidential)

Submit application successfully

We will send the product brochure to your email address

OPM new parts

  • OPM optics: improve intensity and CD uniformity

    For DUV (include PAS and AT system)
    Lens A,B,C, bending point mirror, entrance window
    For I-line
    Interference filter; UV-WG filter
  • New SWS flexcable for scanner (phase 2 and phase 3)

  • New wafer table clean tool

  • Stepper / aligner wafer table

  • TEL

    +86 21 67693080

  • E-MAIL

Simax Shanghai Company Limited
ADDRESS:No.255, SizhuanNan Road, Building 130,
Songjiang district,Shanghai,China.201612.

ALL RIGHTS RESERVED ©2021 Simax Shanghai Company Limited 沪ICP备18039044号-1

沪公网安备 31011702008159号