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Spare Parts
Located in Hong Kong and Singapore
Large selection of ASML mature products parts
check the spare parts list

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OPM new parts

  • OPM optics: improve intensity and CD uniformity

    For DUV (include PAS and AT system)
    Lens A,B,C, bending point mirror, entrance window
    For I-line
    Interference filter; UV-WG filter

  • New SWS flexcable for scanner (phase 2 and phase 3)

  • New wafer table clean tool

  • Stepper / aligner wafer table

  • TEL

    +86 21 67693080

  • E-MAIL

    sales@simaxat.com

Simax Shanghai Company Limited
ADDRESS：No.255, SizhuanNan Road, Building 130,
Songjiang district,Shanghai,China.201612.
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